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紅外透過率

波數(shù)

透過率(%)

1

3610±2cm^-1(GeCl₃OH)

≥98

2

2970~2925cm^-1(CH)

≥99

3

2860~2830cm^-1(HCl)

≥99.4

4

2336±2cm^-1(CO₂)

≥98

5

2272±2cm^-1

≥99

6

2000~1400cm^-1

≥95

7

1173±2cm^-1

≥99

8

1060~1015cm^-1

90

ICP金屬雜質(zhì)測(cè)量

金屬雜質(zhì)測(cè)量技術(shù)指標(biāo)

雜質(zhì)含量（ppb）

1

鈷

≤0.5

2

鉻 

≤0.5

3

銅

≤0.25

4

鐵

≤1.0

5

錳

≤0.25

6

鎳

≤0.5

7

釩

≤0.5

8

鋁

≤0.5

9

鋅

≤0.5

10

鉛

≤0.5

總量

≤5.0

IR Spectral Analysis Transmittance

 Wavenumber

Transmittance(%)

1

3610±2cm^-1(GeCl₃OH)

≥98

2

2970~2925cm^-1(CH)

≥99

3

2860~2830cm^-1(HCl)

≥99.4

4

2336±2cm^-1(CO₂)

≥98

5

2272±2cm^-1

≥99

6

2000~1400cm^-1

≥95

7

1173±2cm^-1

≥99

8

1060~1015cm^-1

90

ICP Spectral Analysis Metallic Impurities

Metallic Impurities

Impurity Content（ppb）

1

Cobalt

≤0.5

2

Chromium

≤0.5

3

Copper

≤0.25

4

 Iron

≤1.0

5

Manganese

≤0.25

6

Nickel

≤0.5

7

Vanadium

≤0.5

8

Aluminium

≤0.5

9

Zinc

≤0.5

10

Plumbum

≤0.5

Total

≤5.0